This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface. .eText ISBN: 9783110712599
Chemistry of Atomic Layer Deposition Ebook (miabook.shop)
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eText ISBN: 9783110712599
Category: Ebook
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